Ceramic Semiconductor Process Equipment Components
Ortech supports the ceramic semiconductor manufacturing industry by supplying ceramic materials and chamber-critical components used in chip-processing equipment. From raw material design and production to finished and assembled components, our vertically integrated manufacturing ensures quality for every step of the process. We also offer clean room (class 1000) packaging services to ensure high cleanness requirements of precision parts applied in semiconductor industry upon delivery to your facility.
Wafer Handling and vacuum wafer chucks
As a leader in technical ceramics for wafer processing equipment, Ortech understands advanced semiconductor manufacturing and constantly develops new materials, designs, and processes to optimize yields and extend product life. Our ultra-flat ceramic vacuum wafer chucks improve yield management for semiconductor wafer processing. Low-surface-contact configurations minimize risk of back-side particles negatively affecting wafer geometry for precision applications.
- Wafer chucks and arm
- Focus rings
- Gas distribution plates
- Cover rings
- Liners & process tubes
- Air bearings
- Alumina Oxide 99.5%
- Aluminum Nitride
- Silicon Nitride
- Silicon Carbide
- CVD Silicon Carbide
- Zirconia Oxide
Ortech provides state of the art technical ceramic semiconductor manufacturing by the most cost effective processes. Ortech maintains efficient manufacturing facilities that support quick turn prototype development and high volume production. Combining our state of the art manufacturing processes with class-leading ceramic semiconductor materials creates a cost effective solution for your most stringent engineering problems. Ortech supports everything from quick-turn prototype development to high-volume production. These processes include:Isostatic Pressing, Dry Pressing and Injection Molding.
Advanced Finishing Services include: Pre- and post-fire ceramic machining, Precision grinding and machining and Lapping and polishing.